Chrome Extension
WeChat Mini Program
Use on ChatGLM
VIPCreated with Sketch.

Development and Diagnostic Study of the RF Nitrogen Atom Source

Mengting Li, Xin Xu, Wubin Wu,Shixiang Peng, Weiping Chen, Zhiyi Zhai,Qing Luo,Haiping Peng,Ailin Zhang

VACUUM（2025）

Cited 1|Views5
Key words
RF ion source,Nitrogen atom,Nitride growth,Global model,Emission spectrum diagnosis
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined