Advances in MEMS Sensors Based on Two-Photon Polymerization 3D Printing(Invited)
CHINESE JOURNAL OF LASERS-ZHONGGUO JIGUANG（2024）
Key words
microelectromechanical systems,femtosecond laser,two-photon polymerization,3D printing,micro-nano fabrication,sensor
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined