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Logic Gates Based on 3D Vertical Junctionless Gate-All-Around Transistors with Reliable Multilevel Contact Engineering

Abhishek Kumar,Jonas Mueller,Sylvain Pelloquin,Aurelie Lecestre,Guilhem Larrieu

NANO LETTERS（2024）

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Key words
nanoelectronics,vertical transport transistor,nanowire,scaled gate-all-around,logic gates,3D device
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