Advancements in Space-Based NUV Spectrography: Precision Fabrication and Evaluation of an Optical Slit Using Optical Lithography and Deep Reactive Ion Etching
SPACE TELESCOPES AND INSTRUMENTATION 2024 ULTRAVIOLET TO GAMMA RAY, PT 1(2024)
关键词
Ultraviolet,Spectrograph,Dumbbell Slit,Deep reactive ion etching,spectral resolution,Space instrumentation
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