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Investigation of Nitrogen-Based Plasma Passivation on GaN RF HEMTs Using Various Precursors

Qiaoyu Hu,Wei-Chih Cheng,Xiguang Chen,Chenkai Deng, Lina Liao,Wenmao Li,Yang Jiang,Jiaqi He, Yi Zhang,Chuying Tang,Peiran Wang,Kangyao Wen,Fangzhou Du,Yifan Cui,Mujun Li,Wenyue Yu,Robert Sokolovskij,Nick Tao,Qing Wang,Hongyu Yu

IEEE Journal of the Electron Devices Society（2024）

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关键词
RF,GaN,plasma treatment
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