Metadiffuser fabricated by DUV KrF 248nm photolithography for wavefront manipulationHsuehli Liu, Chunyen Chou, Linchia Huang, Wilson Guo,Peichen Yu,Chunghsuan Huang,Chaujern ChengMetamaterials, Metadevices, and Metasystems 2023(2023)引用 0|浏览5AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要