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Science Challenges and Research Opportunities for Plasma Applications in Microelectronics

David B. Graves, Catherine B. Labelle,Mark J. Kushner,Eray S. Aydil,Vincent M. Donnelly,Jane P. Chang,Peter Mayer,Lawrence Overzet,Steven Shannon,Shahid Rauf,David N. Ruzic

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena（2024）

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