Full Wafer Combinatorial Deposition With In-Situ XPS/UPS Characterizations
2024 Conference of Science and Technology for Integrated Circuits (CSTIC)（2024）
关键词
Combinatorial Deposition,X-ray Photoelectron Spectroscopy,Work Function,Separate Sites,Site Of Deposition,Properties Of Films,Magnetron Sputtering,Reaction Gas,Purge Gas,Ultraviolet Photoelectron Spectroscopy,Thin Film Materials,Good Isolation,Trimethylaluminum,Uniform Region,Test Chip
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