1 Million Intrinsic Q-Factor Microring Resonators From PVD Aluminum Nitride on SiO2-on-Si Substrate.

Amy S. K. Tong, Wing Wai Chung, Charmaine Goh,Landobasa Y. M. Tobing, Leh Woon Lim, Yuriy A. Akimov, Zhan Jiang Quek, Aravind P. Anthur, Jia Sheng Goh,Huamao Lin,Navab Singh,Qingxin Zhang,Doris K. T. Ng

Optical Fiber Communications Conference and Exhibition（2024）

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摘要

We present PVD AlN microring resonators on SiO2-on-Si substrate with intrinsic Q-factor >1 million at C-band. To the best of our knowledge, this is the highest intrinsic Q-factor reported for PVD AlN on SiO2-on-Si substrate.

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