Low-loss and Thermal-stable Ta2O5 Photonic Platform with Low-temperature Process.

Zhaoting Geng,Weiren Cheng, Zhenyu Liu, Mingjian You, Xiaolun Yu, Pengzhuo Wu, Ning Ding, Xingyu Tang, Yihan Liu, Li Shen,Qiancheng Zhao

Optical Fiber Communications Conference and Exhibition（2024）

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摘要

We demonstrate a Ta2O5 photonic platform with a propagation loss of 0.5dB/cm and a thermo-optic coefficient of 2.3×10-6 /K at 1550 nm. The process temperature is below 350℃, friendly to integration with other optoelectronic components.

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