Wafer-level fabrication of vacuum-gap Fabry-Pérot resonators with quality factors exceeding one billion.

Naijun Jin,Yifan Liu,Dahyeon Lee,Haotian Cheng,Charles A. McLemore, Samuel Halladay,Yizhi Luo,David Mason,Scott A. Diddams,Franklyn Quinlan,Peter T. Rakich

Optical Fiber Communications Conference and Exhibition（2024）

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摘要

We present a wafer-level fabrication method for high-Q, compact vacuum-gap Fabry-Pérot resonators. With quality factors surpassing one billion at 1560 nm, these resonators are well-suited in a range of applications as frequency references.

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关键词

Quality Factor,Optical System,Photoresist,Phase Noise,Vacuum Level,Clock System,Array Of Resonators

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