A 2-axis si/al bimorph-based electrothermal micromirror integrated with piezoresistors for high resolution position sensing

2024 IEEE 37TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, MEMS(2024)

Cited 0|Views3
No score
Abstract
In this work, single-crystal silicon (SCS) is employed to replace fragile SiO2 to construct robust 2-axis electrothermal micromirrors with piezoresistors for position sensing. A lateral shift-free (LSF) SCS/Al bimorph electrothermal bimorph actuator is proposed, and a two-axis LSF SCS/Al electrothermal micromirror with piezoresistors was designed, fabricated and characterized. Each actuator was composed of six segments of bimorph and a thin silicon layer with the thickness of 2 mu m. The dimensions of the square mirror plate are 1800 mu m x 1800 mu m x 30 mu m. The fabricated micromirror achieved a tiptilt angle of 7.2 degrees and piston displacement of 240 mu m under a voltage of 5 V. The performance of the angular shift of the proposed micromirror was improved about one order of magnitude with the value decreasing from 0.035 degrees under open-loop control to 0.0062 degrees under closed-loop control. Compared with SiO2-based bimorphs, the fabrication process is not only simplified, but also provides a method for integrating piezoresistive sensors on the bimorph actuator and realizing feedback control.
More
Translated text
Key words
MEMS micromirror,electrothermal actuation,SCS/Al bimorph,angular shift,feedback control
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined