Effect of van der Waals Forces on Dynamic Properties of Graphene-Based NEMS Resonators

Numerous nanoelectromechanical system (NEMS) resonators have been created, and many formulations are being researched. However, the effect of the van der Waals (vdW) interaction between the two-dimensional (2D) material film and the substrate, which is sensitive to the initial equilibrium delamination and contributes significantly to the NEMS dynamic properties, is not taken into account. This paper reports the effect of the vdW interaction boundary on the dynamic properties of the NEMS resonators, which is the vibration of a 2D material film bonded to a SiO 2 substrate through vdW interaction under external force at different initial equilibrium delamination. A detailed comparison of transient and steady-state responses with and without vdW forces highlights the significant role played by vdW forces. Thus, understanding the vdW interaction boundary is an essential task for designing graphene-based NEMS resonators and testing their working state.