Fabrication of Mems Bulk Sic-Based Accelerometer and its Application in Ground Test of Aero-Engine

This paper reports a MEMS accelerometer based on bulk SiC. The fabrication and packaging scheme were designed, an efficient signal processing circuit was built, and the output performance of the sensor was tested. The test results show that the resistivity of the piezoresistive material is 194.40 Ωꞏum, the sensor’s output sensitivity is 0.21 mV/g, the linearity is 99.8%, and the resonance frequency is 1636 Hz. Finally, the accelerometer was applied to the two ground vibration tests of aero-engine, and the vibration signal of the turbine components and the test bed was successfully extracted.