A Universal Cavity-Based Force Sensor with Reconfigurable Performance for Integration with Thin Film Devices

2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)(2023)

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摘要
To achieve intimate contact between devices and biological tissues for high-fidelity signal acquisition, this work proposes a universal force sensor based on cavity structure which can be integrated into any device with a film substrate to achieve force sensing ability for the interface contact monitoring. Furthermore, due to the adjustable structure, the cavity can also be used as an actuator to enhance interface contact. We integrate the cavity with stretchable graphene electrode on polydimethylsiloxane (PDMS) film, which can be used as high-fidelity electrophysiological and electrochemical sensing without performance degradation during deformation. The multilayer sensor can monitor electrocardiogram (ECG) signals, uric acid (UA) as well as interface contact and actuate to adjust in time.
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关键词
Universal Force Sensor,Interface Contact Monitoring,Adjustable Performance,Multilayer Structure,Electrophysiological And Electrochemical Sensing
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