Stiffness Imbalance Errors Trimming for Silicon Mems Tuning-Fork Gyroscopes with Low Cost Picosecond Lasers
2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)（2023）
Key words
MEMS Tuning-Fork Gyroscopes,Laser Trimming,Frequency Tuning,Mechanical Coupling Suppression
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