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Design and Fabrication of A 4-Terminal In-Plane Nanoelectromechanical Relay

Yingying Li,Simon J. Bleiker,Pierre Edinger,Elliott Worsey,Mukesh Kumar Kulsreshath,Qi Tang,Alain Yuji Takabayashi,Niels Quack,Peter Verheyen,Wim Bogaerts,Kristinn B. Gylfason,Dinesh Pamunuwa,Frank Niklaus

2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)（2023）

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关键词
4-T NEM relays,in-plane Si relays,decoupled signals,low pull-in voltage,ultra-low power consumption
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