An Integrated Platform for Cavity Optomechanics with Vacuum-Sealed Silicon Photonic MEMS
2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)(2023)
摘要
Silicon photonics is an excellent platform for integrated cavity optomechanics due to silicon's high light confinement and favorable mechanical properties. However, optomechanical devices require a vacuum environment to inhibit damping due to air.We present an integrated platform for cavity optomechanics using thermo-compression bonding of silicon caps to provide on-chip vacuum sealing. We demonstrate optomechanical coupling in a vacuum-sealed ring resonator implemented on the platform, either by modulation of the laser power or by using an electrostatic phase shifter in the ring.By enabling optomechanics on a standard platform, we aim to make the technology available to a wider user base.
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关键词
Silicon photonics,optomechanics,vacuum-sealing,silicon photonic foundry,silicon photonic MEMS
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