High-Performance All-Solid-State Micro-Supercapacitor by Using Oxygen Plasma Treatement on LiPON Electrolyte.

This work presents a new strategy to prepare high-performance all-solid-state micro-supercapacitors (ASSMSC). It is found that oxygen plasma treatment on the surface of LiPON is effective to reduce the nitrogen content and lead to the Li 2 O formation near the surface, which is quite helpful to improve LiPON/electrode interface and electrochemical performance of ASSMSC. The treated ASSMSC is experimentally demonstrated to obtain higher specific capacitance (~15.4 mF cm ^-2 vs. 9.0 mF cm ^-2 at 0.5 μA cm ^-2 ), longer cycling retention (~94.7% of the retained capacity after 15000 cycles vs. 84.2%), and higher energy density (~36.0 μWh cm ^-2 vs. 21.0 μWh cm ^-2 ) than the untreated one.