Chrome Extension
WeChat Mini Program
Use on ChatGLM
VIPCreated with Sketch.

Low Temperature (002)-Oriented Zinc Oxide Films Prepared Using Ozone-Based Spatial Atomic Layer Deposition

Wen-Bin Wu,Chia-Hsun Hsu, Xin-Xiang Yue, Wen-Zhi Zhang,Jing Zhang,Xiao-Ying Zhang,Peng Gao,Wan-Yu Wu,Dong-Sing Wuu,Feng-Min Lai,Shui-Yang Lien

CERAMICS INTERNATIONAL（2024）

Cited 0|Views15
Key words
Spatial atomic layer deposition,Zinc oxide,Crystalline orientation,Ozone
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined