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Programmable Activation of Quantum Emitters in High-Purity Silicon with Focused Carbon Ion Beams

M. Hollenbach,N. Klingner,P. Mazarov, W. Pilz,A. Nadzeyka, F. Mayer, N. V. Abrosimov,L. Bischoff,G. Hlawacek,M. Helm,G. V. Astakhov

ADVANCED QUANTUM TECHNOLOGIES（2024）

引用 0|浏览9
关键词
focused ion beam,point defects,single photon emitters,silicon
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