Correction: Achievement of Green and Sustainable CVD Through Process, Equipment and Systematic Optimization in Semiconductor Fabrication

Song Yi Baek,Jingyu Park, Taeyoung Koh, Dohyung Kim, Jewoung Woo, Jinwoo Jung,Se Jun Park,Changsoo Lee, Chulhwan Choi

International Journal of Precision Engineering and Manufacturing-Green Technology（2024）

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