The lumped ultra-high vacuum pumps based on non-evaporable getters

Известия Российской академии наук. Серия физическая(2023)

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摘要
The lumped vacuum pumps based on the non-evaporable getters (NEG) have got wide application in accelerator vacuum systems. These pumps are one of the types using for vacuum obtaining in the synchrotron source of 4th generation SFR “SKIF”. In BINP, the NEG prototypes with pumping speed of 300, 600, 900 and 1300 L/s for hydrogen were created and investigated. The pumps construction and test results are presented here.
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