Transverse Inscription of Silicon Waveguides by Picosecond Laser Pulses
arxiv(2024)
摘要
In this paper, picosecond laser inscription of segmented waveguides in
crystalline silicon based on a deterministic single-pulse modification process
is demonstrated.Pulses of 43 ps duration at 1.55 μm wavelength are used
to transversely inscribe periodic structures with a pulse-to-pulse pitch of
around 2 μm. Infrared shadowgraphy images and Raman spectroscopy
measurements indicate that the modifications exhibit a spherical shape.
Characterization of waveguide performance at 1.55 μm for various pulse
energies and periods is carried out. Direct comparison with numerical
simulations confirms the presence of graded index waveguides, encompassing a
micrometer core size and a maximum refractive index change of around 7×
10^-3. This short-pulse inscription approach can pave the way for
three-dimensional integrated photonic devices in the bulk of silicon.
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