Non-Volatile Memory Based on ZnO Thin-Film Transistor with Self-Assembled Au Nanocrystals.

Hui Xie,Hao Wu,Chang Liu

Nanomaterials (Basel, Switzerland)(2024)

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摘要
Non-volatile memory based on thin-film transistor is crucial for system-on-panel and flexible electronic systems. Achieving high-performance and reliable thin-film transistor (TFT) memory still remains challenging. Here, for the first time, we present a ZnO TFT memory utilizing self-assembled Au nanocrystals with a low thermal budget, exhibiting excellent memory performance, including a program/erase window of 9.8 V, 29% charge loss extrapolated to 10 years, and remarkable endurance characteristics. Moreover, the memory exhibits favorable on-state characteristics with mobility, subthreshold swing, and current on-off ratio of 17.6 cm2V-1s-1, 0.71 V/dec, and 107, respectively. Our study shows that the fabricated TFT memory has great potential for practical applications.
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关键词
TFT memory,NVMs,nanocrystals,SoP,ALD
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