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Development of a Selective Wet-Chemical Etchant for Precise 3D Sculpting of Silicon Enabled by Infrared Non-Linear Laser Modification

Mona Zolfaghari Borra,Behrad Radfar,Hisham Nasser,Tahir Colakoglu,Onur Tokel,Ahmet Turnali,Merve Demirtas,Dilek Isik Tasgin,Hande Ustunel,Daniele Toffoli,Fatih Omer Ilday,Rasit Turan,Ihor Pavlov,Alpan Bek

Optics & Laser Technology（2024）

Cited 1|Views27
Key words
Laser treatment,Silicon,Wet etching,Amorphous materials,Analytical methods
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