Pull-In Voltage and Stress in Fixed-Fixed Beams of RF MEMS SwitchesAnna Persano,Girolamo Tagliapietra,Jacopo Iannacci,Alvise Bagolini,Fabio Quaranta,Pietro SicilianoProceedings（2024）引用 0|浏览21关键词MEMS,fixed-fixed beam,pull-in voltage,residual stressAI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
