High-accuracy experimental determination of photon mass attenuation coefficients of transition metals and lithium fluoride in the ultra-soft energy range

In the field of quantitative X-ray analysis techniques, such as electron probe microanalysis, precise knowledge of fundamental parameters is crucial. Especially, the accurate determination of photon mass attenuation coefficients is essential to perform correct elemental quantification. While the widely used databases offer agreement for the hard X-ray range, significant differences arise for lower photon energies. Furthermore, addressing the uncertainties of the tabulated data, which can be of several hundreds of percent, is of urgent need. Driven by recent advances in analytical techniques in the low energy range including investigation of materials containing lithium, the interest in a reliable set of photon mass attenuation coefficients is steadily increasing. In this study, we experimentally determine photon mass attenuation coefficients for lithium fluoride, aluminium, and different transition metals in the extreme low energy range from 40 eV to a several hundreds of eV. This high-precision experimental determination allows a comparison with the existing data tables. We observe differences that turn out to be significant, especially around the absorption edges. Precise knowledge of photon mass attenuation coefficients for elemental quantification in X-ray analysis is crucial. The transmittance measurements reveal significant differences from existing data tables, particularly around absorption edges.