Vertically tailored hybrid multilayer EUV photoresist with vertical molecular wire structureMyung Mo Sung, Hyeonseok Ji, Jaehyuk Lee,Jinho Ahn, Chang Gyoun Kim,Sangsul Lee,Yasin Ekinci, Prajith Karadan,Dimitrios KazazisOptical and EUV Nanolithography XXXVII(2024)引用 0|浏览0暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要