Vertically tailored hybrid multilayer EUV photoresist with vertical molecular wire structure

Myung Mo Sung, Hyeonseok Ji, Jaehyuk Lee,Jinho Ahn, Chang Gyoun Kim,Sangsul Lee,Yasin Ekinci, Prajith Karadan,Dimitrios Kazazis

Optical and EUV Nanolithography XXXVII(2024)

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