Advanced Strategies for High Activation in Ion Implanted 4H-Sic by Laser Annealing

C. Calabretta,A. Pecora,M. Agati,A. Muoio,V. Scuderi,S. Privitera,R. Reitano,N. Piluso,A. Severino,S. Boninelli,F. La Via

2024 25th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)（2024）

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Key words

Ionizing Radiation,Energy Density,Laser Irradiation,Area Of Occurrence,Epitaxial Layer,Scanning Electron Microscopy,Conductive,Crystallinity,Refractive Index,Thermal Conductivity,Extinction Coefficient,Finite Element Method,Scanning Electron Microscopy Analysis,Laser Treatment,Point Defects,Optical Parameters,Increased Surface Roughness,Excimer Laser,Graphite Layers

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