Assessing Innovative Bulk (111) 3C-Sic Epitaxial Growth

C. Calabretta,V. Scuderi,C. Bongiorno,R. Anzalone,M. Mauceri,D. Crippa,S. Boninelli,F. La Via

2024 25th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)（2024）

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关键词

Epitaxial Growth,Chemical Vapor Deposition,Scanning Transmission Electron Microscopy,Si Substrate,Point Defects,High-performance Devices,Chemical Vapor Deposition Growth,Density Functional Theory,Thermal Expansion,Growth Temperature,Growth Direction,Field Emission Gun,Epitaxial Layer,Distribution Of Defects,High Growth Temperature,Defect Band

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