High-Frequency Grating-Based Microelectromechanical Systems Actuator Inês Pires,Inês S. Garcia, João Vieira,Zeev Zalevsky,Carlos Calaza,Filipe S. Alves,Rosana A. DiasProceedings(2024)引用 0|浏览16关键词high frequency,electrostatic,actuatorAI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要