Control of Selective SiGe Etching by Enhanced Formation of Hydroxyl Radicals and by Surface Passivation in Peracetic Acid Solution
APPLIED SURFACE SCIENCE（2024）
关键词
SiGe,Selective etching,Peracetic acid,Hydroxyl radical,Surface passivation
AI 理解论文
溯源树
样例
生成溯源树，研究论文发展脉络
Chat Paper
正在生成论文摘要