Thin-Film Silicon MEMS for Dynamic Mass Sensing in Vacuum and Air: Phase Noise, Allan Deviation, Mass Sensitivity and Limits of Detection (vol 28, pg 390, 2019)
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS（2024）
关键词
1,f noise,Sensitivity,Micromechanical devices,Sensors,Root mean square,Phase noise,Microelectromechanical systems
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