Analytically Assisted FEM Approach for the Design and Optimization of Laterally Excited Bulk Acoustic Wave Resonators (xbars) with a High Electromechanical Coupling
Applied Physics A（2024）
关键词
Lithium niobate (LiNbO3),Laterally excited bulk wave resonators,Electromechanical coupling coefficient (k ),Antisymmetric lamb modes,XBARs and MBVD
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