The Piezoelectricity of AlScN Thin Films under High-Pressure Regime

This study investigated the structural, mechanical, piezoelectric, and electromechanical properties of AlScN thin films using density functional theory (DFT) under varying levels of applied pressure, ranging from 0 to 20 GPa. The primary focus of this research is to explore the feasibility of optimizing AlScN thin films for surface acoustic wave (SAW) applications through pressure-induced modifications. Our findings reveal two significant outcomes. First, we observe a notable increase in the elastic constant C33 as a function of pressure. This increase signifies a substantial enhancement in material stiffness, directly influencing wave propagation and velocity within the thin films. Second, a remarkable 68