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Plasma-enhanced Atomic-Layer-deposited HfO2–SiO2 Nanolaminates for Broadband Antireflection Coatings

Xuechen Zhang,Tingting Zeng,Chen Song,Jianda Shao,Meiping Zhu

Optical Materials（2024）

Cited 0|Views18
Key words
Nanolaminates,Broadband antireflection coating,Plasma -enhanced atomic layer deposition,Pre -correction strategy,Coating design
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