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Dynamic Motion Trajectory Control with Nanoradian Accuracy for Multi-Element X-ray Optical Systems Via Laser Interferometry

Sina M Koehlenbeck,Lance Lee, Mario D Balcazar, Ying Chen,Vincent Esposito, Jerry Hastings,Matthias C Hoffmann,Zhirong Huang,May-Ling Ng, Saxon Price,Takahiro Sato,Matthew Seaberg,Yanwen Sun, Adam White,Lin Zhang,Brian Lantz,Diling Zhu

Light, science & applications（2025）

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关键词
Adaptive Optics,Large-Scale Metrology,Dimensional Metrology
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