Fabrication of Wafer-Level Vacuum-Packaged 3C-Sic Resonators with Q-Factor above 250,000Sergio Sapienza,Luca Belsito,Matteo Ferri,Ivan Elmi,Marcin Zielinski,Francesco La Via,Alberto RoncagliaProceedings（2024）引用 0|浏览8关键词3C-SiC,Q-factor,Ti getterAI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
