Low-cost and Convenient Fabrication of Polymer Micro/Nanopores with the Needle Punching Process and Their Applications in Nanofluidic Sensing
arxiv(2024)
摘要
Solid-state micro/nanopores play an important role in the sensing field
because of their high stability and controllable size. Aiming at problems of
complex processes and high costs in pore manufacturing, we propose a convenient
and low-cost micro/nanopore fabrication technique based on the needle punching
method. The thin film is pierced by controlling the feed of a microscale
tungsten needle, and the size variations of the micropore are monitored by the
current feedback system. Based on the positive correlation between the
micropore size and the current threshold, the size-controllable preparation of
micropores is achieved. The preparation of nanopores is realized by the
combination of needle punching and chemical etching. Firstly, a conical defect
is prepared on the film with the tungsten needle. Then, nanopores are obtained
by unilateral chemical etching of the film. Using the prepared conical
micropores resistive-pulse detection of nanoparticles is performed. Significant
ionic current rectification is also obtained with our conical nanopores. It is
proved that the properties of micro/nanopores prepared by our method are
comparable to those prepared by the track-etching method. The simple and
controllable fabrication process proposed here will advance the development of
low-cost micro/nanopore sensors.
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