Metalorganic chemical vapour deposition of β-Ga2O3 films in a close-coupled showerhead reactorMichael HeukenOxide-based Materials and Devices XV（2024）引用 0|浏览0暂无评分AI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
