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Growth Mechanism of a Batch Deposited Sic Coating on Large-Size Graphite Plates Based on Multi-Scale Simulation

JOURNAL OF CRYSTAL GROWTH(2024)

Cited 1|Views16
Key words
A1.Computer simulation,A1.Substrates,A1.Surfaces,A2.Growth from vapor,A3. Chemical vapor deposition processes,B2.Semiconducting materials
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