SF6 Mixed in N2 Gas Sensing Responses from CMOS-compatible AlN and ScAlN Pyroelectric Detectors
MOEMS AND MINIATURIZED SYSTEMS XXIII（2024）
关键词
greenhouse gases,SF6 gas sensor,pyroelectric detector,scandium aluminum nitride,aluminum nitride,CMOS compatible,non-dispersive infrared
AI 理解论文
溯源树
样例
生成溯源树，研究论文发展脉络
Chat Paper
正在生成论文摘要