Laser-lift-off of GaN-based transistors with an ultra-short-pulsed deep UV laser

Lutz Deriks, Eldad Bahat Treidel,Elisabeth Brandl, Julian Bravin,Enrico Brusaterra,Serhiy Danylyuk

Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX（2024）

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