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Exploring the Relationship Between Deposition Method, Microstructure, and Performance of Nb/Si-Based Superconducting Coplanar Waveguide Resonators

Jin-Su Oh,Cameron J. Kopas,Jayss Marshall,Xiaotian Fang,Kamal R. Joshi,Amlan Datta,Sunil Ghimire,Joong-Mok Park,Richard Kim, Daniel Setiawan,Ella Lachman,Joshua Y. Mutus,Akshay A. Murthy,Anna Grassellino,Alex Romanenko,John Zasadzinski,Jigang Wang,Ruslan Prozorov,Kameshwar Yadavalli,Matt Kramer,Lin Zhou

ACTA MATERIALIA（2024）

Cited 1|Views59
Key words
Superconducting qubit,Nb film,Transmission electron microscopy,Quality factor,Superconducting property
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