Al2O3 growth in PMMA thin films by sequential infiltration synthesis: in situ thickness evolution and mass uptake investigation.

Michele Perego,Gabriele Seguini,Claudia Wiemer, Federica Elvira Caligiore,Elena Cianci

Materials Advances（2024）

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摘要

Sequential infiltration synthesis (SIS) represents a simple and straightforward approach to grow inorganic materials into polymeric films. In this work a combination of in situ and ex situ spectroscopic ellipsometry...

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