Towards True In-situ Temperature Compensation Utilizing Multiple Parameter Decoupling for Resonant MEMS Sensors Subject to Blue Sideband Excitation

This work conducts a thorough comparison between two temperature compensation methods for resonant MEMS sensors, i.e. (1) a newly proposed in-situ temperature compensation technique based on a multiple parameter decoupling (MPD) using a single resonant MEMS sensor subject to blue-sideband excitation (BSE), and (2) the prevailing method utilizing a temperature sensor, which, in this work, is a resonant thermometer in close vicinity of the sensor. Experimental results show that the MPD-based in-situ temperature compensation method offers better noise performance, long-term stability (4-fold at 1000s integration time) and application simplicity, compared to the compensation method using an additional thermometer, affirming that the proposed subject is of considerable potential for true in-situ temperature compensation for high-precision resonant MEMS sensors.