Low-loss 800nm-thick PECVD silicon nitride photonic platform on 300-mm waferHong Cai,Bo Li,Yiding Lin, Haitao Yu, Steven Hou Jang Lee, Chin Khang Tew, Jae Ok Yoo, Charmaine Goh, Shervonne Woon,Doris Keh Ting Ng,Navab Singh,Xianshu Luo,Lennon Yao Ting LeeAdvanced Fabrication Technologies for Micro/Nano Optics and Photonics XVII（2024）引用 0|浏览0暂无评分AI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
