Carbon nanotubes grown by plasma enhanced chemical vapor deposition of acetylene in the presence of water vapor

UIS INGENIERIAS(2024)

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摘要
Carbon nanotubes can be synthesized using various techniques. This work aims to study the experimental process of growing carbon nanotubes via plasma-enhanced chemical vapor deposition (PECVD). Additionally, the study aims to calibrate the reactor and develop a LabVIEW code to introduce water into the process, enabling a water-assisted PECVD procedure. The obtained samples are evaluated through the analysis of SEM images and Raman spectra.
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关键词
carbon nanotubes,plasma-enhanced chemical vapor deposition,water-assisted PECVD
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