Carbon nanotubes grown by plasma enhanced chemical vapor deposition of acetylene in the presence of water vapor
UIS INGENIERIAS(2024)
摘要
Carbon nanotubes can be synthesized using various techniques. This work aims to study the experimental process of growing carbon nanotubes via plasma-enhanced chemical vapor deposition (PECVD). Additionally, the study aims to calibrate the reactor and develop a LabVIEW code to introduce water into the process, enabling a water-assisted PECVD procedure. The obtained samples are evaluated through the analysis of SEM images and Raman spectra.
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关键词
carbon nanotubes,plasma-enhanced chemical vapor deposition,water-assisted PECVD
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