Higher-order resonance of single-crystal diamond cantilever sensors toward high f?Q products

MEMS resonant sensing devices require both HF (f) and low dissipation or high quality factor (Q) to ensure high sensitivity and high speed. In this study, we investigate the resonance properties and energy loss in the first three resonance modes, resulting in a significant increase in f center dot Q product at higher orders. The third order resonance exhibits an approximately 15-fold increase in f center dot Q product, while the Q factor remains nearly constant. Consequently, we achieved an ultrahigh f center dot Q product exceeding 10(12) Hz by higher-order resonances in single-crystal diamond cantilevers.